| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inexpensive high-performance probe device for inputting/outputting an electric signal for inspecting operation of a semiconductor integrated circuit, and to provide a method for manufacturing the probe device, and a method for inspecting the semiconductor integrated circuit. Ž<P>SOLUTION: This probe device 1 includes: a glass substrate 11 on which a plurality of through-holes 21 filled with conductive paste are arranged, provided with a pad 23 on one surface, and provided with an electrode 24 and extraction wiring 25 on the other surface; a first anisotropic conductive sheet 12 pasted on the surface side provided with the pad 23 of the glass substrate 11; a second anisotropic conductive sheet 13 pasted on the surface side provided with the electrode 24 and the extraction wiring 25 of the glass substrate 11, and having an opening part 31; a printed board 14 pasted on the surface side on which the glass substrate 11 of the second anisotropic conductive sheet 13 is not pasted, and having an opening part 32; and a pressing tool 15 provided with a projection part 41 having a shape fitted to the opening part 31 of the second anisotropic conductive sheet 13 and the opening part 32 of the printed board 14. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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