| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a testing apparatus of a semiconductor device free from troubles such as a leak defect or a failure of a test board caused by generation of frost in the test board. Ž<P>SOLUTION: This apparatus includes: the test board 2; a support stand 4 loaded on the test board 2; a socket 5 provided on the support stand 4, connected electrically to the test board 2 through wiring 3, on which the semiconductor device to be tested can be mounted detachably; a cooling device 6 for discharging cold wind toward the socket 5; and a dehumidifying device 7 for discharging warm wind 22 toward the wiring 3. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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