| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a hydrostatic bearing unit capable of adjusting a clearance of a hydrostatic bearing pad easily. Ž<P>SOLUTION: A linear guide device includes a plurality of admission pipes 21-24 for supplying compressed air, a plurality of groups of pressure control portions 25-26 and flow meters 29-32 which control the pressure and the flow rate of the compressed air which flows through the respective admission pipes 21-24 and a plurality of hydrostatic bearing pads 6-9 which inject the compressed air supplied via the respective admission pipes 21-24 toward rails 2, 3 and support a movable table 4 in non-contact manner. Then, The pressure and flow rate of the compressed air can be controlled individually for each hydrostatic bearing pad. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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