| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a joining method capable of inexpensively joining two substrates in a short time with an excellent joining strength; and to provide a joined body by such a joining method. Ž<P>SOLUTION: The joining method includes the steps of: preparing a first substrate 21 and a second substrate 22, of which at least one has transmissivity to ultraviolet light, and forming a liquid coating 30 by supplying a liquid material 35 containing a silicone material to at least one of the substrates 21 and 22; drying the liquid coating 30 to make a joined film 3; expressing adhesiveness in the vicinity of a surface 32 by bringing plasma in contact with the joined film 3; obtaining the joined body 1 in which the substrates 21 and 22 are joined via the joined film 3; and adjusting the joining strength of the joined film 3 to lower strength than joining strength due to joining by the adhesiveness expressed by the contact of the plasma by irradiating the joined body 1 with ultraviolet light from a substrate side having the transmissivity to ultraviolet light in the substrates 21 and 22 on a predetermined condition. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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