| 摘要 |
PROBLEM TO BE SOLVED: To suppress damage of a target sample to be held and contamination of the target sample, and to stably suck and hold the target sample to be held with relatively large suction force. SOLUTION: The sample holder for sucking and holding a sample by electrostatic force includes: a substrate; and an electrode layer provided on one main surface of the substrate. The surface of the electrode layer is covered with a semi-conductive film with Si as a main constituent. COPYRIGHT: (C)2010,JPO&INPIT
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