| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric composite substrate by which the single-crystal base material of a piezoelectric material can be reused, a single-crystal thin film is obtained with an even thickness in the orientation of a crystal axis according to the orientation of the single-crystal base material of the piezoelectric material, and microcavities can be formed with high efficiency. <P>SOLUTION: The method of manufacturing the piezoelectric composite substrate including the single-crystal thin film of the piezoelectric material includes an ion implantation process (S1) and a separation process (S2). In the ion implantation process (S1), He<SP>+</SP>ions are implanted into a single-crystal base material 1 of the piezoelectric material. Thus the microcavities are densely formed on a separation layer 3 that is located inside the single-crystal base material 1 and is separated from a surface of the single-crystal base material 1. In the separation process (S2), a thermal stress is applied to the microcavities formed in the ion implantation process (S1). Thus the single-crystal base material 1 is separated via the separation layer 3 so as to peel off a single-crystal thin film 4. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
