| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer device capable of simultaneously producing a comparatively large concavo-convex structure pattern that is difficult to produce by an EB drawing device and a minute concavo-convex structure pattern by EB drawing. SOLUTION: A press device 1 includes a lower press part 4 on which a transfer substrate 3 is placed, and an upper press part 5 disposed opposed to the lower press part 4 such that it can move up and down. A stamper 6 is removably fitted to the undersurface of the upper press part 5. The stamper 6 has a fitting surface 6A which is fitted to the upper press part 5 and a transfer surface 6B which is located opposite to the fitting surface 6A and on which a first concavo-convex structure pattern 7a to be transferred to the transfer substrate 3 is formed. A second concavo-convex structure pattern 7b which differs from the first concavo-convex structure pattern 7a and is transferred to the transfer substrate 3 together with the first concavo-convex structure pattern 7a when the first concavo-convex structure pattern 7a is transferred is provided on either the section of the upper press part 5 to which the fitting surface 6A is fitted, or the fitting surface 6A, or an intermediary member provided between the upper press part 5 and the fitting surface 6A. COPYRIGHT: (C)2010,JPO&INPIT |
