| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acoustoelectronic component which can guarantee sensitivity at a low-frequency side and is highly reliable. Ž<P>SOLUTION: The acoustoelectronic component includes a mounting substrate (111), a member (112) disposed on the mounting substrate and having one or both a cavity functioning as an acoustic capacity and a groove functioning as acoustic resistance, and a wafer chip (113) arranged on the member, and provided with an acoustic element on a surface of the chip and with a backside cavity functioning as the acoustic capacity at the backside of the chip below the acoustic element. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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