发明名称 |
EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE AND CONTROL METHOD FOR EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE |
摘要 |
[Problem] An extreme ultraviolet light source device in accordance with the present invention corrects an optical performance of a laser beam in an appropriate manner. [Means for Resolution] A guide laser beam that has an optical axis and a beam diameter substantially equivalent to those of a driver pulsed laser beam is introduced into an amplification system 30 that amplifies a laser beam that is output from a driver laser oscillator 20. The guide laser beam is output from a laser device 50 as a continuous light, and is introduced into a light path of the driver pulsed laser beam via a guide laser beam introduction mirror 52. A sensor 44 detects an angle (a direction) of a laser beam and a variation of a curvature of a wave front. A wave front correction controller 60 outputs a signal to a wave front correction part 34 based on a measured result of a sensor 36. The wave front correction part 34 corrects a wave front of a laser beam to be a predetermined wave front according to an instruction from the wave front correction controller 60.
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申请公布号 |
US2010117009(A1) |
申请公布日期 |
2010.05.13 |
申请号 |
US20090612861 |
申请日期 |
2009.11.05 |
申请人 |
GIGAPHOTON INC. |
发明人 |
MORIYA MASATO;WAKABAYASHI OSAMU |
分类号 |
G21K5/00;H01J7/30;H01S3/10 |
主分类号 |
G21K5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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