发明名称 APPARATUS FOR SPRAYING A CHEMICAL
摘要 PURPOSE: A chemical spraying apparatus is provided to set a spray direction of nozzles to a reference direction by combining a spray pipe with a supply pipe. CONSTITUTION: A supply pipe(100) supplies a chemical. The supply pipe includes a first connection unit(110). The first connection unit includes a first hook unit(116) at the center. A spray pipe(200) includes a second connection unit(220). The second connection unit is combined with the first connection unit. The spray pipe includes a plurality of nozzles(210). The nozzles spray the chemical to the substrate. The second connection unit includes a second hook unit(224). The second hook unit is combined with the first hook unit.
申请公布号 KR20100046925(A) 申请公布日期 2010.05.07
申请号 KR20080105969 申请日期 2008.10.28
申请人 SEMES CO., LTD. 发明人 SON, SUK HO
分类号 H01L21/302;H01L21/00 主分类号 H01L21/302
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