| 摘要 |
PURPOSE: A substrate processing system stands in line the location of substrate through the rotation of align eccentric cap. The damage of substrate by the misalignment is prevented. CONSTITUTION: A loading chamber(LC) loads substrate. An unloading chamber(ULC) unloads the substrate provided from the transfer chamber(TC) to outside. At least, 2 processing chambers(PC1, PC2) are arranged in order to be each other opposite to the inline type. The transfer chamber is arranged between the processing chamber.
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