发明名称 UNIT AND APPARATUS FOR AND METHOD OF SUPPLYING CHEMICAL
摘要 PURPOSE: A unit and an apparatus for and a method of supplying liquid medicine are provided to reduce a time for preparing the liquid medicine by simplifying the steps of preparing the liquid medicine. CONSTITUTION: A liquid medicine storing cylinder(100) stores liquid medicine. A liquid medicine supply tube(200) supplies the liquid medicine to the liquid medicine storing cylinder. A liquid medicine valve(210) opens and closes the liquid medicine supply tube. A gas supplying pipe(300) supplies gas to the liquid medicine storing cylinder. The gas valve(310) opens and closes the gas supplying pipe. A transfer pipe(400) transfers the liquid medicine of the liquid medicine storing cylinder to an outlet unit. A transfer valve(410) opens and closes the transfer pipe.
申请公布号 KR20100046831(A) 申请公布日期 2010.05.07
申请号 KR20080105858 申请日期 2008.10.28
申请人 SEMES CO., LTD. 发明人 KANG, BYUNG CHUL;OH, RAE TAEK;YU, JAE HYEOK
分类号 H01L21/302;H01L21/00 主分类号 H01L21/302
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