发明名称 |
UNIT AND APPARATUS FOR AND METHOD OF SUPPLYING CHEMICAL |
摘要 |
PURPOSE: A unit and an apparatus for and a method of supplying liquid medicine are provided to reduce a time for preparing the liquid medicine by simplifying the steps of preparing the liquid medicine. CONSTITUTION: A liquid medicine storing cylinder(100) stores liquid medicine. A liquid medicine supply tube(200) supplies the liquid medicine to the liquid medicine storing cylinder. A liquid medicine valve(210) opens and closes the liquid medicine supply tube. A gas supplying pipe(300) supplies gas to the liquid medicine storing cylinder. The gas valve(310) opens and closes the gas supplying pipe. A transfer pipe(400) transfers the liquid medicine of the liquid medicine storing cylinder to an outlet unit. A transfer valve(410) opens and closes the transfer pipe.
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申请公布号 |
KR20100046831(A) |
申请公布日期 |
2010.05.07 |
申请号 |
KR20080105858 |
申请日期 |
2008.10.28 |
申请人 |
SEMES CO., LTD. |
发明人 |
KANG, BYUNG CHUL;OH, RAE TAEK;YU, JAE HYEOK |
分类号 |
H01L21/302;H01L21/00 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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