| 摘要 |
PURPOSE: A heater system for manufacturing a semiconductor is provided to reduce power consumption by operating a plurality of heater units with power amount corresponding to the operation of one heater unit. CONSTITUTION: A plurality of heater units(110) heat a plate or a solution used for processing a substrate. A power supply unit(120) supplies power for operating one heater unit. A power distributor(130) is interposed between the power supply unit and the heater units. The power distributor supplies the power supplied from the power supply unit to heater units one by one.
|
