发明名称 |
METHOD OF FORMING A PATTERN ARRAY OF FERROELECTRIC PVDF THIN FILM BY USING A POLYMER BINDER |
摘要 |
PURPOSE: A method for forming a pattern array of a ferroelectric PVDF thin film using a polymer binder is provided to mass produce a pattern array of the ferroelectric PVDF thin film using the polymer binder. CONSTITUTION: A PVDF polymer and a UV curable polymer binder are dissolved in a solvent. A PVDF thin film is formed by coating a dissolved mixture on a substrate. A UV curing is induced on a UV irradiated part by irradiating UV through a mask patterned on the coated thin film. A pattern array is formed by removing the non-cured part using the solvent.
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申请公布号 |
KR20100046641(A) |
申请公布日期 |
2010.05.07 |
申请号 |
KR20080105570 |
申请日期 |
2008.10.28 |
申请人 |
KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY |
发明人 |
KOO, CHONG MIN;HONG, SOON MAN;HWANG, SEUNG SANG |
分类号 |
H01L27/085 |
主分类号 |
H01L27/085 |
代理机构 |
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代理人 |
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