发明名称 METHOD OF FORMING A PATTERN ARRAY OF FERROELECTRIC PVDF THIN FILM BY USING A POLYMER BINDER
摘要 PURPOSE: A method for forming a pattern array of a ferroelectric PVDF thin film using a polymer binder is provided to mass produce a pattern array of the ferroelectric PVDF thin film using the polymer binder. CONSTITUTION: A PVDF polymer and a UV curable polymer binder are dissolved in a solvent. A PVDF thin film is formed by coating a dissolved mixture on a substrate. A UV curing is induced on a UV irradiated part by irradiating UV through a mask patterned on the coated thin film. A pattern array is formed by removing the non-cured part using the solvent.
申请公布号 KR20100046641(A) 申请公布日期 2010.05.07
申请号 KR20080105570 申请日期 2008.10.28
申请人 KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY 发明人 KOO, CHONG MIN;HONG, SOON MAN;HWANG, SEUNG SANG
分类号 H01L27/085 主分类号 H01L27/085
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