METHOD FOR MANUFACTURING PROBE AND PROBE CARD

摘要

PURPOSE: A probe and a method for manufacturing a probe card are provided to suppress the deterioration of a surface property of a probe by forming the probe on a conductive pattern. CONSTITUTION: A first conductive layer is formed on a substrate(S200). A photoresist layer is formed on the first conductive layer(S300). A photoresist pattern is formed by exposing and developing the photoresist layer(S400). A conductive pattern electrically connected to the first conductive layer is formed on an incline part(S500). A probe is formed by forming a conductive material on the conductive pattern and the exposed first conductive layer(S600). A part surrounding the probe is removed(S700).