MEMS DEVICES AND METHODS OF ASSEMBLING MICRO ELECTROMECHANICAL SYSTEM(MEMS)

摘要

PURPOSE: An MEMS device and an MEMS assembly method are provided to remove an alignment error by sufficiently arranging an MEMS part on a bump pattern. CONSTITUTION: A glass layer(102) comprises a first surface and a second surface. A glass layer has one or more reference characteristic parts. A metal layer(104) comprises the first surface and the second surface. The first surface of the metal layer is connected to the first surface of the glass layer. The metal layer includes at least two windows(112). At least two windows are arranged to allow the optical detection of the reference characteristic part. A plurality of MEMS parts(106) are connected to the second surface of the glass layer. A bump pattern(108) is optically arranged with the plurality of MEMS parts.