发明名称 PROBE CARD
摘要 PURPOSE: A probe card is provided to control the number of semiconductors to be inspected through one inspection process in response to the variation of the number of semiconductor devices formed on a wafer. CONSTITUTION: A printed circuit board(200) comprises a circuit pattern. A space transformer(300) comprises a first pad and a second pad. The first and second pads perform pitch transformation. A probe unit(400) comprises a plurality of probes and a probe block. The plurality of probes are mounted on the probe block. The probe block unit forms a receiving space of the probe unit. An interposer unit of one probe is opposite to the end of the second support unit. The interposer unit of another probe is opposite to the space between the body unit and the second support unit.
申请公布号 KR20100046980(A) 申请公布日期 2010.05.07
申请号 KR20080106048 申请日期 2008.10.28
申请人 WILL TECHNOLOGY CO., LTD. 发明人 JEON, BYOUNG IL;JU, YOUNG HUN;PARK, JONG HYUN;KWON, HYUK RANG;CHOI, YU KWON
分类号 H01L21/66 主分类号 H01L21/66
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