| 摘要 |
PURPOSE: A heater system for manufacturing a semiconductor is provide to sense an over current due to an interlock by monitoring a current supplied to a heater unit through an interlock sensor. CONSTITUTION: At least one heater unit heats a solution used for processing a substrate and a plate. A power supply unit(120) supplies power for driving the heater unit. An interlock unit(130) is formed on a power line supplied from the power supply unit to the heater unit. The interlock unit interrupts the power when an over current is generated by sensing the current supplied to the heater unit. An interlock sensor(140) senses the interlock occurrence possibility by monitoring the abnormality of the supply current.
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