| 发明名称 |
SPIN HEAD |
| 摘要 |
PURPOSE: A spin head are provided to supports a substrate stably by preventing force from being concentrated on a part of chuck pins. CONSTITUTION: A rotation plate(340) has a spiral screw thread(341) in the outside of an upper side of the rotation plate. A plurality of chuck pins(500) are formed in the lower side to be engaged with screw thread and are protruded to the upper side of the substrate to support the side of the substrate.
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| 申请公布号 |
KR20100046830(A) |
申请公布日期 |
2010.05.07 |
| 申请号 |
KR20080105857 |
申请日期 |
2008.10.28 |
| 申请人 |
SEMES CO., LTD. |
发明人 |
JEONG, YOUNG JU;CHOI, SE HYEONG |
| 分类号 |
H01L21/00;H01L21/02;H01L21/302;H01L21/3065 |
主分类号 |
H01L21/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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