| 摘要 |
PURPOSE: A heater interlock device is provided to reduce a manufacturing time and manufacturing costs of an interlock device by being formed on a single substrate. CONSTITUTION: An overheating switch(110) is formed on a substrate. The overheating switch interrupts the power of a heater when a chemical solution is heated above a preset temperature. A low level switch(120) is formed on the substrate and interrupts the power of the heater when the level of the chemical solution is below a reference height. A low level switch relay(130) is formed on the substrate. The low level switch relay delays the operation of the low level switch.
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