PLASMA PROCESSING METHOD AND COMPUTER STORING MEDIUM,申请号KR20067017788-传众专利搜索

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发明名称	PLASMA PROCESSING METHOD AND COMPUTER STORING MEDIUM
摘要
申请公布号	KR100956466(B1)	申请公布日期	2010.05.07
申请号	KR20067017788	申请日期	2005.03.02
申请人		发明人
分类号	H01L21/318;C23C8/36;H01L21/205;H01L21/28;H01L21/314;H01L29/51;H01L29/78	主分类号	H01L21/318
代理机构		代理人
主权项
地址

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