| 摘要 |
<P>PROBLEM TO BE SOLVED: To shorten the time required for an inspection process, and to acquire the height of a protrusion in an inspection body by a simple structure, by using a photographed image and simultaneously observing not only the shape of the front part of the protrusion but also its sides in the inspection body. Ž<P>SOLUTION: One surface of a microprism sheet (MPS) is so shaped that a plurality of mountain-shaped portions having cross sections in the shape of an equilateral triangle and having the same shape and the same size are connected repeatedly in such a way as to extend in one direction, and the other surface is a flat surface. The microprism sheet made up of transparent material is arranged at a position close to the inspection body (S), and an imaging device 10 is arranged at a position where the inspection body can be photographed through this microprism sheet. By an image photographed with the imaging device, the sides of the protrusion in the inspection body are observed together with the front part of the protrusion, and the height of the protrusion in the inspection body is acquired as an amount proportional to the interval between two points on the image corresponding to one point on the inspection body. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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