摘要 |
A planar array of GMR or TMR sensor elements with planar free and pinned layers is used as the basis of a sensor for detecting the presence of small magnetized particles. In particular, the sensor is used for detecting the presence of magnetized particles bonded to biological molecules that are themselves bonded to a substrate. The magnetized particles on the molecules are detected by the sensors as a result of the interaction between the stray fields of the particles and the magnetic configuration of the sensors. By forming a co-planar layer of soft magnetic material over the sensor or its array, the external field used to magnetize the particles is self-aligned perpendicularly to the sensor plane whereby it does not interfere with the stray fields of the particles.
|