| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric-substance film of a PZT system which is satisfactory in both the piezoelectric performance and durability. <P>SOLUTION: In this manufacturing method of the piezoelectric substance film constituted of a perovskite oxide represented by a formula (P), a process (A) for performing film formation under a condition of a/b≥1.07, and a process (B) for performing film formation under a condition of a/b<1.07 are executed, in this order, and a perovskite single-phase structure does not contain pyrochlore phase and satisfies the condition: a/b≤1.06. The formula (P) is Pb<SB>a</SB>(Zr<SB>x</SB>, Ti<SB>y</SB>, M<SB>b-x-y</SB>)<SB>b</SB>O<SB>c</SB>, where M represents one kind or two, or more kinds of B site elements. Furthermore, although the formula satisfies 0<x<b, 0<y<b, 0≤b-x-y, with a:b:c=1:1:3, where these mole ratios may shift from reference mole ratios, in a range allowing the perovskite structure. <P>COPYRIGHT: (C)2010,JPO&INPIT |
