发明名称 SEMICONDUCTOR DEVICE INCLUDING A REDUCED STRESS CONFIGURATION FOR METAL PILLARS
摘要 In a metallization system of a sophisticated semiconductor device, metal pillars may be provided so as to exhibit an increased efficiency in distributing any mechanical stress exerted thereon. This may be accomplished by significantly increasing the surface area of the final passivation layer that is in tight mechanical contact with the metal pillar.
申请公布号 US2010109158(A1) 申请公布日期 2010.05.06
申请号 US20090575618 申请日期 2009.10.08
申请人 发明人 PLATZ ALEXANDER;LEHR MATTHIAS;KUECHENMEISTER FRANK
分类号 H01L23/498;H01L21/3205 主分类号 H01L23/498
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