发明名称 METHOD FOR PRODUCING A HYBRID SUBSTRATE WITH AN EMBEDDED ELECTRICALLY INSULATING CONTINUOUS LAYER
摘要 The invention relates to a method for producing a hybrid substrate comprising the following steps: - a first substrate (10) is prepared, comprising a mixed layer extended by an underlying electrically insulating continuous layer (11) and made up of first single-crystal areas (12A) and second adjacent areas (12B) in an amorphous material, said second areas making up at least part of the free surface of said first substrate; a second substrate (20) that comprises, on the surface thereof, a reference layer with a predetermined crystallographic orientation, is bonded to said first substrate by hydrophobic molecular bonding at least onto said amorphous areas; recrystallisation of at least part of the amorphous areas to solid phase is carried out according to the crystallographic orientation of the reference layer, and the two substrates are separated at the bonding interface.
申请公布号 WO2010049654(A1) 申请公布日期 2010.05.06
申请号 WO2009FR52091 申请日期 2009.10.29
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE;SIGNAMARCHEIX, THOMAS;FOURNEL, FRANCK;CLAVELIER, LAURENT;DEGUET, CHRYSTEL 发明人 SIGNAMARCHEIX, THOMAS;FOURNEL, FRANCK;CLAVELIER, LAURENT;DEGUET, CHRYSTEL
分类号 H01L21/762;H01L21/84 主分类号 H01L21/762
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