LIQUID-COOLING MICROWAVE PLASMA APPLICATOR FOR MICROWAVE PLASMA SYSTEM, AND LIQUID-COOLING DIELECTRIC WINDOW

摘要

PROBLEM TO BE SOLVED: To provide a liquid-cooling plasma applicator for a microwave plasma system using a microwave-absorbing liquid.

SOLUTION: A cooling pipe 80 equipped with an inlet 82 and an outlet 84 is wound around a discharge tube 86. The cooling pipe 80 covers the outer surface of the discharge tube 86 with a spiral channel so that a small interval 88 is made between loops of the channel. A microwave electric field turns to a direction parallel to a longitudinal axis 90 extending through the center of the discharge tube 86. With this direction used, the microwave energy can easily penetrate into the discharge tube 86 between the loops of the spiral channel without being attenuated by liquid, and plasma is formed and sustained.

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