| 摘要 |
PROBLEM TO BE SOLVED: To control formation of a fine structure in preparation of an optical device to form the fine structure on a substrate in real time. SOLUTION: A method for preparing the optical device D1 to form the fine structure having a plurality of dot metal portions 74 on a substrate 40 capable of exciting plasmon by optical irradiation, includes the steps of irradiating the fine structure with reference light L during the formation of the fine structure, detecting scattered light Ls by the fine structure irradiated with the reference light L, and controlling the formation of the fine structure based on optical characteristics of the scattered light Ls varying in response to the shape of the fine structure. COPYRIGHT: (C)2010,JPO&INPIT
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