发明名称 |
FLUORINATED MONOMER OF CYCLIC ACETAL STRUCTURE, POLYMER, RESIST PROTECTIVE COATING COMPOSITION, RESIST COMPOSITION, AND PATTERNING PROCESS |
摘要 |
A fluorinated monomer of cyclic acetal structure has formula (1) wherein R is a C1-C20 alkyl group which may be substituted with halogen or separated by oxygen or carbonyl, and Z is a divalent organic group which forms a ring with alkylenoxy and contains a polymerizable unsaturated group. A polymer derived from the fluorinated monomer may be endowed with appropriate water repellency, water sliding property, lipophilicity, acid lability and hydrolyzability and is useful in formulating a protective coating composition and a resist composition.
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申请公布号 |
US2010112482(A1) |
申请公布日期 |
2010.05.06 |
申请号 |
US20090608556 |
申请日期 |
2009.10.29 |
申请人 |
WATANABE TAKERU;SHINACHI SATOSHI;KINSHO TAKESHI;HASEGAWA KOJI;HARADA YUJI;HATAKEYAMA JUN;MAEDA KAZUNORI;KOBAYASHI TOMOHIRO |
发明人 |
WATANABE TAKERU;SHINACHI SATOSHI;KINSHO TAKESHI;HASEGAWA KOJI;HARADA YUJI;HATAKEYAMA JUN;MAEDA KAZUNORI;KOBAYASHI TOMOHIRO |
分类号 |
G03F7/004;C07D307/04;C07D307/77;C07D315/00;C07D319/06;C08F114/18;C08F214/18;C08K5/06;C08L27/12;G03F7/20 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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