| 发明名称 |
MODULAR BASE-PLATE SEMICONDUCTOR POLISHER ARCHITECTURE |
| 摘要 |
The present invention generally relates to a polishing system. Particularly, the present invention relates a polishing apparatus having one or more modular polishing stations, and a plurality of polishing heads movably connected to a transferring system. |
| 申请公布号 |
WO2010002595(A3) |
申请公布日期 |
2010.05.06 |
| 申请号 |
WO2009US47689 |
申请日期 |
2009.06.17 |
| 申请人 |
APPLIED MATERIALS, INC.;YILMAZ, ALPAY |
发明人 |
YILMAZ, ALPAY |
| 分类号 |
H01L21/304 |
主分类号 |
H01L21/304 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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