Laser device i.e. driver laser, for use in extreme-UV-light source device, has longitudinal mode-control units for adjusting main oscillator, such that wavelengths of laser lights are included in one of amplification lines

摘要

The device has a main oscillator i.e. semiconductor laser (61), for outputting longitudinal mode-laser lights. An amplifier (PA) i.e. carbon dioxide-gas-laser, contains a molecular gas as an amplifying medium, where the amplifying medium amplifies the laser lights. The oscillator has two wavelength selecting devices that are arranged in an inner side of a resonator, and an optical multiplexer multiplexes the laser lights. Longitudinal mode-control units (4, 5) adjust the oscillator in such a manner that wavelengths of the laser lights are included in one of amplification lines.