Micro valve for adjusting microburners, microgenerators, microreformers, microreactors, microfuel cells, and cooling or heating systems, and for use in micro-process engineering, micro-power engineering and microanalytics, has valve chamber

摘要

The micro valve is provided with a valve chamber (4) that has an inlet channel (5) and an outlet channel, where an expansion chamber (2) is provided with a working medium expanded by heating. A membrane (3) separates the chambers and working medium. The membrane allows a through flow of a fluid from the inlet channel to the outlet channel through the valve chamber in the open condition of the micro valve. The working medium is selected from the group consisting of oils, alcohols, water, ethers and mixtures. The micro valve consists of steel, silicon, ceramics and polymers.