METHOD OF MANUFACTURING MAGNETIC RECORDING MEDIUM, MAGNETIC RECORDING MEDIUM, MAGNETIC RECORDING DEVICE, AND MANUFACTURING APPARATUS OF MAGNETIC RECORDING MEDIUM

摘要

<P>PROBLEM TO BE SOLVED: To suppress production of a reaction product of a magnetic layer or a non-magnetic layer and a residual gas while suppressing production of a mixed layer of the magnetic layer and the non-magnetic layer in a layer interface when a multilayer magnetic recording layer is formed. Ž<P>SOLUTION: A method of manufacturing a magnetic recording medium includes a magnetic recording layer forming process for forming the multilayer magnetic recording layer wherein a plurality of magnetic layers and a plurality of non-magnetic layers are alternately layered on a substrate by repetitively performing sputtering processing in a vacuum chamber. In the magnetic recording layer forming process, discharge of sputtering processing is suspended for a prescribed time and the vacuum chamber is evacuated during a prescribed time so that an ultimate degree of vacuum in the vacuum chamber becomes a prescribed value or less from completion of deposition of each magnetic layer or non-magnetic layer until start of deposition of next non-magnetic layer or magnetic layer. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž