| 摘要 |
PROBLEM TO BE SOLVED: To provide a substantially hydrogen-free low chromium-containing DLC (diamond like carbon) film which can withstand a high load even under high speed sliding, and to provide a sliding component formed with the substantially hydrogen-free low chromium-containing DLC film. SOLUTION: Regarding the substantially hydrogen-free low chromium-containing DLC film, in the case the content of Cr in a DLC film is defined as X(at%) and the surface hardness of the DLC film is defined as Y(Hv) by Vickers hardness, which lies within a region satisfying the respective inequalities of 0.5≤X≤0.7, 300≤Y<500 and Y<-869X+1043. Further, the sliding component is obtained by forming a first layer made only of Cr and a second layer made of Cr and C between the DLC film and a base material. COPYRIGHT: (C)2010,JPO&INPIT
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