发明名称 TESTING DEVICE AND CIRCUIT MODULE
摘要 <p>The device is provided with a first testing substrate and a second testing substrate that are disposed face-to-face, a first testing circuit that is provided on the surface of the first testing substrate that faces the second testing substrate in order to test a device under test, a second testing circuit that is provided on the surface of the second testing substrate that faces the first testing substrate in order to test the device under test, and a sealed part that seals off a space between the first testing substrate and the second testing substrate so as to seal the first testing circuit and the second testing circuit inside a common space, and wherein the common space is filled with a cooling material.</p>
申请公布号 WO2010050132(A1) 申请公布日期 2010.05.06
申请号 WO2009JP05393 申请日期 2009.10.15
申请人 ATAKA, TSUYOSHI;KOJIMA, SHOJI;ADVANTEST CORPORATION 发明人 ATAKA, TSUYOSHI;KOJIMA, SHOJI
分类号 G01R31/28 主分类号 G01R31/28
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