发明名称 |
TESTING DEVICE AND CIRCUIT MODULE |
摘要 |
<p>The device is provided with a first testing substrate and a second testing substrate that are disposed face-to-face, a first testing circuit that is provided on the surface of the first testing substrate that faces the second testing substrate in order to test a device under test, a second testing circuit that is provided on the surface of the second testing substrate that faces the first testing substrate in order to test the device under test, and a sealed part that seals off a space between the first testing substrate and the second testing substrate so as to seal the first testing circuit and the second testing circuit inside a common space, and wherein the common space is filled with a cooling material.</p> |
申请公布号 |
WO2010050132(A1) |
申请公布日期 |
2010.05.06 |
申请号 |
WO2009JP05393 |
申请日期 |
2009.10.15 |
申请人 |
ATAKA, TSUYOSHI;KOJIMA, SHOJI;ADVANTEST CORPORATION |
发明人 |
ATAKA, TSUYOSHI;KOJIMA, SHOJI |
分类号 |
G01R31/28 |
主分类号 |
G01R31/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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