发明名称 DRIVER CIRCUIT AND DISPLAY DEVICE
摘要 The driver circuit includes an inverter circuit having a first thin film transistor including a first oxide semiconductor film and a second transistor including a second oxide semiconductor film. The first thin film transistor and the second thin film transistor are enhancement transistors, in which a silicon oxide film including an OH group is provided on and in contact with the first oxide semiconductor film and the second oxide semiconductor film, and a silicon nitride film is provided on and in contact with the silicon oxide film.
申请公布号 WO2010050419(A1) 申请公布日期 2010.05.06
申请号 WO2009JP68292 申请日期 2009.10.19
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD.;KOYAMA, JUN;YAMAZAKI, SHUNPEI 发明人 KOYAMA, JUN;YAMAZAKI, SHUNPEI
分类号 H01L29/786 主分类号 H01L29/786
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