发明名称
摘要 An encapsulated device comprising an integrated gas permeation sensor is provided, comprising a base substrate with an electronic component arranged thereon being enclosed within an encapsulation for protecting the electronic component from moisture and/or oxygen; at least one sensor is arranged within the encapsulation to measure the permeation of gas into the encapsulation; each sensor comprises an electrically conductive sensing element comprising a moisture and/or oxygen sensitive material, wherein the reaction of said material with moisture and/or oxygen results in a change in the electrical resistance/conductivity of the sensor.
申请公布号 JP2010515050(A) 申请公布日期 2010.05.06
申请号 JP20090543989 申请日期 2006.12.28
申请人 发明人
分类号 G01M3/16;G01N15/08;G01M3/04;G01N27/04;G01N27/12;H01L51/50;H05B33/04;H05B33/10 主分类号 G01M3/16
代理机构 代理人
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