| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technology allowing detection sensitivity to be improved without cost increase. <P>SOLUTION: The sensor device (1) comprises a board (10), a first, a second and a third electrodes (12, 13, 14) formed on the board, a drive circuit (15) controlling the voltage of the first and the second electrodes formed on the board, and a detection circuit (16) detecting current from the third electrode formed on the board. Each of the drive circuit and the detection circuit is a thin film circuit. <P>COPYRIGHT: (C)2010,JPO&INPIT |
