发明名称 PHOTOELECTRIC CONVERSION DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 <p><P>PROBLEM TO BE SOLVED: To suppress: oxidization of a lower electrode due to reaction between metal elements in the lower electrode and oxygen in a bonding layer; contamination due to diffusion of metal elements in the lower electrode to a semiconductor layer being a photoelectric conversion layer; and disappearance of the semiconductor layer due to reaction. <P>SOLUTION: The present invention relates to: a photoelectric conversion device which has, on a substrate having an insulating surface, a back surface electrode layer, a crystalline semiconductor layer having a semiconductor bonding, and a light-reception-surface electrode layer, wherein the back surface electrode layer is formed by laminating a first conductive layer formed of metal nitride or high-fusion-point metal, a second conductive layer consisting principally of aluminum (Al) or silver (Ag), and a third conductive layer having low reactivity with a semiconductor material; and a method of manufacturing the same. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2010103510(A) 申请公布日期 2010.05.06
申请号 JP20090218322 申请日期 2009.09.23
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 HIROSE TAKASHI;KATAISHI RIHO;SHIMOMURA AKIHISA
分类号 H01L31/04 主分类号 H01L31/04
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