发明名称 RETAINING RING WITH TAPERED INNER SURFACE
摘要 A retaining ring has a generally annular body with a top surface, a bottom surface, an inner diameter surface, and an outer diameter surface. The outer diameter surface includes an outwardly projecting flange having a lower surface, and the bottom surface includes a plurality of channels.
申请公布号 US2010112914(A1) 申请公布日期 2010.05.06
申请号 US20100687804 申请日期 2010.01.14
申请人 APPLIED MATERIAL, INC. 发明人 MAROHL DAN A.;TSENG MING-KUEI
分类号 B24B41/06;B24B37/04;H01L21/306 主分类号 B24B41/06
代理机构 代理人
主权项
地址