APPARATUS FOR TRANSFERRING A CASSETTE

摘要

PURPOSE: A cassette transferring device is provided to discharge impurities or particles generated inside a space part and a housing by installing an exhaust line in the housing which includes a space part of a guide rail and a driving part. CONSTITUTION: A first transferring device(100) transfers a cassette in a linear direction. A second transferring device(200) is arranged in a vertical direction with the first transferring device. A cassette up/down unit(300) is installed in an orthogonal section where the first transferring device and the second transferring device are vertically contact with each other. The cassette up/down unit lifts the cassette in order to transfer a cassette(500) transferred to the first transferring device to the second transferring device. The first transferring device comprises a guide rail(20) which is installed in a linear transferring section, a cassette carrier(30), a driving unit which drives the carrier. The cassette carrier linearly moves along the guide rail.