| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a compact, high-efficiency and simple ultrasonic motor by configuring stacked single-plate piezoelectric vibrators at a side ratio different from a conventional one. <P>SOLUTION: Rectangular single-plate piezoelectric vibrators are laminated to form a multilayer piezoelectric vibrator. The multilayer piezoelectric vibrator vibrates in a multiple vibration mode that is a combination of a primary vertical vibration mode and a primary flexural vibration mode, to generate a driving force. In the ultrasonic motor, the single-plate piezoelectric vibrators are each formed so that value of w/L is substantially 1.05, where L is the length in an expansion/contraction direction when the single-plate piezoelectric vibrators vibrate in the primary vertical vibration mode and w is the length in a shear direction when the single-plate piezoelectric vibrators vibrate in the primary flexural mode. The single-plate vibrators are laminated in the thickness direction. <P>COPYRIGHT: (C)2010,JPO&INPIT |
