| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an image forming method for obtaining a sample image with stable clearness of a contour even with a sample likely to generate drift, as well as a charged particle beam device using the above method. <P>SOLUTION: The image forming method is to comprise a first imaging process for obtaining a first image datum by imaging a sample S in line scan, a first digitalizing process of digitalizing clearness of a contour of first image datum, a threshold value setting process for setting a threshold value Ms of the clearness from a value M1 indicating clearness of the contour of the first image datum obtained from the first digitalization process, a second imaging process of obtaining a second image datum by imaging the sample S in area scan, a second digitalization process for digitalizing clearness of a contour of the second image datum, a determination process for determining whether a value M2 indicating clearness of a contour of the second image datum satisfies the threshold value Ms, and a storage process of selecting and memorizing images based on results of the determination process. <P>COPYRIGHT: (C)2010,JPO&INPIT |
