| 摘要 |
PROBLEM TO BE SOLVED: To provide a mass flow sensor operated with especially high reliability, and also to provide an automobile including the mass flow sensor. SOLUTION: This mass flow sensor includes a sensor chip or is constituted as a sensor chip, and the sensor also has a form wherein at least one sensor heating element, at least one sensor element, and an evaluation unit are integrated in the sensor chip. The evaluation unit is constituted as follows: a mass flow of a fluid flow and a flow direction of the fluid flow are detected by at least one sensor element, and at least one sensor heating element is driven and controlled based on the detected mass flow and the detected flow direction, and the mass flow sensor is heated at least partially by at least one sensor heating element. COPYRIGHT: (C)2010,JPO&INPIT |
