发明名称 METHOD FOR PRODUCING SUBSTRATE FOR GROWING CARBON NANOTUBE AND METHOD FOR PRODUCING CARBON NANOTUBE
摘要 PROBLEM TO BE SOLVED: To provide a method for producing a substrate for growing carbon nanotube which enables to grow carbon nanotubes at a low temperature, and a method for producing carbon nanotubes. SOLUTION: The method for producing a substrate for growing carbon nanotube comprises bringing a carbon-containing gas into contact with a catalyst layer 11 formed on a substrate S to grow a carbonaceous substance 12 from the catalyst layer 11 using a CVD method, and removing the carbonaceous substance 12 to produce the objective substrate 1 for growing carbon nanotube. The method for producing carbon nanotubes comprises growing carbon nanotubes 14 from the substrate for growing carbon nanotube. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010100463(A) 申请公布日期 2010.05.06
申请号 JP20080272457 申请日期 2008.10.22
申请人 ULVAC JAPAN LTD 发明人 NAKANO MINAO;MURAKAMI HIROHIKO
分类号 C01B31/02 主分类号 C01B31/02
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