发明名称 |
SILICA GLASS CRUCIBLE FOR PULLING UP SILICON SINGLE CRYSTAL, METHOD FOR MANUFACTURING THEREOF AND METHOD FOR MANUFACTURING SILICON SINGLE CRYSTAL |
摘要 |
A silica glass crucible for pulling up a silicon single crystal including a wall part and a bottom part is provided with a natural silica glass layer which forms at least one part of a an inner surface of the bottom part, and a synthetic silica glass layer which forms at least an inner surface of the wall part, wherein a concentration of Ca included in the natural silica glass layer is 0.5 ppm or less.
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申请公布号 |
US2010107965(A1) |
申请公布日期 |
2010.05.06 |
申请号 |
US20090607519 |
申请日期 |
2009.10.28 |
申请人 |
JAPAN SUPER QUARTZ CORPORATION |
发明人 |
FUKUI MASANORI;KUDO SATOSHI;MORIKAWA MASAKI |
分类号 |
C30B15/10;C03B19/01 |
主分类号 |
C30B15/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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