发明名称 MAGNETO-RESISTANCE ELEMENT AND MAGNETIC MEMORY
摘要 PROBLEM TO BE SOLVED: To reduce variance in element shape while preventing a short circuit between two magnetic layers between which a nonmagnetic layer is sandwiched. SOLUTION: The magnetic memory includes an inter-layer insulating layer 26 provided on a substrate 20, a conductive base layer 11 provided on the inter-layer insulating layer 26, and a magneto-resistance element provided on the base layer 11 and including two magnetic layers 12 and 13 and a nonmagnetic layer 13 sandwiched therebetween. The etching rate of the base layer 11 is lower than those of the magnetic layers. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010103224(A) 申请公布日期 2010.05.06
申请号 JP20080271847 申请日期 2008.10.22
申请人 TOSHIBA CORP 发明人 SUGIURA KUNIAKI;KAJIYAMA TAKESHI;ASAO YOSHIAKI;TAKAHASHI SHIGEKI;AMANO MINORU
分类号 H01L43/12;H01L21/8246;H01L27/105;H01L43/08 主分类号 H01L43/12
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