STACKED INTEGRATED CIRCUIT PACKAGE FABRICATION METHODS THAT USE VIAS FORMED AND FILLED AFTER STACKING, AND RELATED STACKED INTEGRATED CIRCUIT PACKAGE STRUCTURES

摘要

Microelectronic packages are fabricated by stacking integrated circuits upon one another. Each integrated circuit includes a semiconductor layer having microelectronic devices and a wiring layer on the semiconductor layer having wiring that selectively interconnects the microelectronic devices. After stacking, a via is formed that extends through at least two of the integrated circuits that are stacked upon one another. Then, the via is filled with conductive material that selectively electrically contacts the wiring. Related microelectronic packages arc also described.