VHF ASSEMBLY

摘要

The invention relates to a VHF plasma electrode comprising a preferably prismatic, elongated electrode body having an electrode surface that is or can be electrically connected to at least two connecting elements for supplying electric power, at least one first connecting element being coupled to or in the vicinity of a first front face and at least one second connecting element being coupled to or in the vicinity of a second front face of the electrode body, and the electrode is preferably located in a potting compound consisting of a dielectric material that does not cover the electrode surface. Preferably a shielding element that does not cover the electrode surface and that surrounds the electrode together with the potting compound is provided. The electrode is characterised in that at least one of the connecting elements is designed as a VHF vacuum feedthrough element.