| 摘要 |
The present invention relates to an imprinting apparatus for imprinting a pattern on a substrate using a stamp. More particularly, the present invention relates to an imprinting apparatus which prevents slippage and enables pressure to be uniformly applied when the stamp and the substrate are stacked into a layer and pressed, thereby improving the characteristics of the pattern imprinted on the substrate. To this end, the imprinting apparatus according to the present invention comprises a press housing having a bottom surface with an opening, an elastic press plate arranged to seal the opening, and made of an elastic material, an assistant press plate which is fixed onto an upper surface of the elastic press plate, and which has an upper surface on which the stamp and the substrate are stacked, and which is made of a hard material, and a press chamber which includes an exhaust pipe arranged at a side surface of the press housing, and an exhaust pump connected to the exhaust pipe, to discharge air from the inside of the press housing to the outside. The elastic press plate moves upward when air is discharged from the inside of the press housing to the outside, to thereby enable the stamp and the substrate to be tightly pressed against each other by the assistant press plate and an upper surface of the press housing. |
